Spectrum: Concordia University Research Repository
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A silicon micromachined subminiature condenser microphone : analysis, design, fabrication and testing
Microphones are ordinary pressure sensors with an optimum behavior in a certain pressure and frequency range. The fundamental elements of a condenser microphone comprises of a diaphragm, backplate, airgap, and rear volume cavity. In order to analyze any system for its response behavior due to a part
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