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A micromachined silicon vibrating-beam angular rate sensor : a design and implementation study

Nikpour, Behrouz
Spectrum: Concordia University Research Repository · Papers
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Design and Implementation of a Silicon-Beam Angular Rate Sensor is studied. The sensing device is designed based on a micromachined single crystal silicon beam. Electromagnetic actuation supplies the reference vibration, and the Coriolis-induced vibration is sensed by a capacitor plate in close prox
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