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Face-to-face anneal temperature controls lattice parameter in Ta(C,N) virtual substrates for AlGaN power electronics
Tantalum carbide (TaC) thin film ''virtual'' substrates are a highly desirable material for $\text{Al}_{0.5}\text{Ga}_{0.5}\text{N}$ vertical power electronics devices due to lattice matching, thermal expansion matching, and metallic conductivity. However, the material has not been demonstrated to s
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