Conceptio › Archive › HAL (France)
HAL (France)open access

Flexible III-Nitride drum resonators with integrated piezoelectric transduction

A Kassem et al.
HAL (France) · Papers · License: Open Access
Open Source ↗
Drum resonator, III-Nitrides, Piezoelectric transduction, Integrated actuation and detection, Temperature sensing, AlGaN/GaN heterostructure, Flexible MEMS, 0
This document is indexed with metadata only — full text is not available in the archive for this record. Open the official source ↗
Record · ID 1066031
Retrieved via Conceptio — every document is proof-bundled with source, license, and retrieval metadata.