HAL (France)open access
Flexible III-Nitride drum resonators with integrated piezoelectric transduction
Drum resonator, III-Nitrides, Piezoelectric transduction, Integrated actuation and detection, Temperature sensing, AlGaN/GaN heterostructure, Flexible MEMS, 0
This document is indexed with metadata only — full text is not available in the archive for this record.
Open the official source ↗
Record · ID 1066031
Retrieved via
Conceptio — every document is proof-bundled with source, license, and retrieval metadata.