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Enhanced electron-beam lithography to reduce the frequency scatter of 200-400 GHz superconducting microstrip resonators for on-chip filterbank spectrometers
Integrated superconducting spectrometers (ISSs) provide the instantaneous bandwidth, sensitivity, and scalable architecture for large-scale spectroscopic surveys in submillimeter-wave astronomy and cosmology. However, the accuracy with which the resonant frequencies of superconducting microstrip ban
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