Deutsche Nationalbibliothek
metadata only
Liquid-phase synthesis of silicon and silicon carbide thin-films via atmospheric pressure chemical vapor deposition / Benedikt Fischer ; Uwe Rau, Andrei Vescan
Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2026
Conceptio Open Archive
Analyze & explore related research in Conceptio
Connect this record directly into your research workflow or AI agent. Explore citations across open repositories, query full text, and export structured proof bundles.
This document is indexed with metadata only: full text is not available in the archive for this record. Open the official source ↗
Related documents
- Phase compositions of Si oxynitride: A comprehensive thermodynamic modeling study#1129414
- Characterization of alane (AlH3) thin films grown by atomic layer deposition for hydrogen storage applications#468085
- Topological phase transition in quantum-heat-engine cycles#955364
- Middle-temperature thermally stimulated transformations of Cu-Si-O films.#209527
- Contribution of the impurity to the thermodynamic properties of a quantum dot with a Gaussian confinement potential#413888
Record · ID 1078741
Retrieved via Conceptio: every document is proof-bundled with source, license, and retrieval metadata.
Retrieved via Conceptio: every document is proof-bundled with source, license, and retrieval metadata.
Bring this data into your agent: Connect via MCP or API · 20 free credits to start · no card required
Read the Docs → · View CLI source on GitHub · Conceptio Open Knowledge Archive
Read the Docs → · View CLI source on GitHub · Conceptio Open Knowledge Archive