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Bimorph Lithium Niobate Thickness-Shear Overtone Film Bulk Acoustic Resonator

Yao, Ziqian et al.
arXiv (OAI Expanded) · Papers
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applied-physics
High quality factor ($Q$) and overtone operation enable narrow-linewidth acoustic devices with multiple discrete frequencies in a single cavity. Maintaining both high $Q$ and sufficient electromechanical coupling at higher mode orders remains challenging. Here, we demonstrate a bimorph periodically
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