arXiv (OAI Expanded)
open access
Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes
Periodic multilayer mirrors for X-rays require a layer period controlled to about 0.1 nm, set by deposition rates held in the laboratory's own notebook. A supervising model session gave a large language model agent a target multilayer specification and calibration constants derived from a laboratory
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