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Positive‐Tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet‐Etching
Antimony trisulfide (Sb 2 S 3 ), as an emerging material for integrated photonic devices, has attracted significant attention due to its high index, low loss, and phase‐changing property in the optical regime. However, conventional lithography‐based fabrication methods involve complex, time‐consumin
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