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RF MEMS Switches for Wide-band (5 - 40 GHz), Tuneable Filters and DMTL Phase Shifters
radio-frequency (rf), micro-electro-mechanical systems (mems), micro-machining, capacitive switches, phase shifter, tunable bandpass and band-stop filters, aluminum nitride (aln) dielectric charging, lifetime and reliability
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Record · ID 1100094
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