AIN Thin Film Structures for High-Q Resonators

Name: AIN Thin Film Structures for High-Q Resonators
Published: 2010
License: Open Access

Artieda, Alvaro · 2010

DataCite · Datasets · License: Open Access · 2010

aluminum nitride, thin films, baw, tfbar, q-factor, oscillator, nitrure d'aluminium, films minces

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Record · ID 1100256
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