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Fabry-Pérot Resonance Shifts as a Novel Non-destructive In Situ Surface Damage Diagnostic

Blume, Gregory et al.
arXiv (All) · Papers
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accelerator-physicsmaterials-science
Current surface damage evaluation for nanostructured electronic devices requires specialized equipment or conditions outside the designed operating environment and cannot be used for in situ evaluation of surface damage. In this work, we developed a non-destructive method to probe the surface sublim
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