arXiv (OAI Expanded)
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A transfer-rod-mounted rotatable sample holder enabling a compact modular vacuum system for ion-beam milling, oblique magnetron sputtering, and co-sputtering
We present a novel multifunctional sample-holder concept for compact research-scale vacuum systems. The sample holder is mounted directly on the transfer rod and remains mechanically connected to it throughout loading, transfer, deposition, and ion-beam milling. In contrast to conventional layouts,
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