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Stitch-Free, Diamond-Scribed Silicon Nitride Photonic Integrated Circuits for the Visible Band

Mandal, Kishor Kumar et al.
arXiv (OAI Expanded) · Papers
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optics
Silicon nitride photonic integrated circuits for the visible band are conventionally built with a buried oxide overcladding and singulated with wafer-scale tooling, constraints that preclude evanescent access to the guided mode for externally integrated emitters. We report a PECVD grown $Si_3N_4$ pl
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