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Electrothermal behavior of superconducting nanowires buried in a commercial CMOS process
Superconducting films native to a commercial CMOS process enable co-integration of superconducting devices (high-kinetic-inductance elements and nanowire detectors) with cryogenic CMOS on one monolithic die. Such films are buried in the front-end-of-line, beneath the back-end-of-line metal stack, an
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