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Operando Surface Probe Microscopy Reveals Electrochemical Origins of Reliability Variability in Hafnia Ferroelectrics

Tullibilli, Anudeep et al.
arXiv (All) · Papers
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materials-science
Device-to-device and sample-to-sample variability remains a major obstacle to the reliable implementation of hafnia-based ferroelectrics, even in nominally identical structures fabricated under similar processing conditions. This highlights the need for operando diagnostic probes that provide proces
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