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Development of a low-loss aluminum nitride on insulator (AlNOI) photonic platform for electro-optic modulation

Redouane Amrar
HAL (France) · Papers · License: Open Access
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Integrated photonics, AlN-sur-isolant AlNOI, Pockels effect, Cyclic thermal annealing, Electro-optic modulation, Modulation électro-optique, AlN-on-insulator AlNOI, Pulvérisation réactive
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Record · ID 1146691
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