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A Nonlinear Two-Sheath Circuit Model for Low-Pressure Symmetric and Asymmetric Capacitively Coupled Radio-Frequency Plasmas
We develop a nonlinear self-consistent two-sheath circuit model for low-pressure capacitively coupled plasmas that applies to geometrically symmetric as well as asymmetric discharges. The quasineutral plasma bulk is represented by an inductive-resistive element and coupled to stationary particle and
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