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Hydrogen-Assisted Defect Engineering of Doped Poly-Si Films for Passivating Contact Solar Cells
Hydrogen-assisted defect engineering, via a hydrogenated silicon nitride (SiNx:H) capping layer, on doped polycrystalline silicon (poly-Si) passivating-contact structures, is explored using complementary techniques. The hydrogen treatment universally improves the passivation quality of poly-Si/SiOx
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