Solid-state reaction synthesis of superconducting refractory-metal germanides for Ge/SiGe quantum devices

Solid-phase reactions offer a route to integrate superconductors into Ge/SiGe heterostructures, but forming high-quality superconducting layers near the buried Ge quantum well remains challenging. We investigate reactions of V, Ta, and Nb with elemental Ge and with the Si$_{0.2}$Ge$_{0.8}$ barrier o