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Inverse-Designed High-Q/V Silicon Nitride Photonic Crystal Cavities for Second- and Third-Harmonic Generation
SiN photonic crystal (PhC) cavities are promising platforms for nonlinear and quantum photonics because of their wide transparency window, CMOS compatibility, and negligible two-photon absorption. However, realizing high-Q/V cavities remains challenging because of the relatively low refractive index
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