[my]-FEMOS: Mikro-Fertigungstechniken für hybride mikroskopische Sensoren

Name: [my]-FEMOS: Mikro-Fertigungstechniken für hybride mikroskopische Sensoren
License: Open Access

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DataCite · Datasets · License: Open Access

mechanical engineering, power engineering, fertigungsautomatisierung, mikrosystemtechnik, nanotechnologie

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Record · ID 129885
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