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Optimierungstechniken für TMR Schichtsysteme und Qualifizierung von Oxidationsquellen auf Wafer-Skala : Verbundprojekt: Evaluierung von produktionstauglichen Beschichtungs- und Oxidationsverfahren für magnetische Tunnel-Schichtsysteme zur Herstellung von MRAMs : Kurz: Magnetische Tunnel-Schichtsysteme zur Herstellung von MRAMs ; Teilvorhaben ; Teil I+II: Kurze Darstellung/Eingehende Darstellung ; Berichtszeitraum 01.01.2002 bis 31.12.2004
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