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Morphologies of reactive nanolayer stacks sputtered on ceramic low-temperature cofired ceramic substrates having a micrometer-scale surface roughness
The deposition of reactive multilayer systems (RMSs) is investigated on low-temperature cofired ceramic (LTCC) substrates having different surface morphologies. In this study, the morphologies of RMS layers that are deposited on glass-ceramic LTCC substrates are analyzed. Different surface morpholog
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