Synthese von B-C-N Schichten aus flüssigen Ausgangsstoffen mittels DC Plasmajet CVD

Name: Synthese von B-C-N Schichten aus flüssigen Ausgangsstoffen mittels DC Plasmajet CVD
License: Open Access

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synthese, kohlenstoff, pecvd-verfahren, bor, stickstoff, ternäres system, mechanical engineering, power engineering, oberflächentechnik, wärmebehandlung

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Record · ID 132081
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