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Quantum state-resolved studies of direct and precursor-mediated dissociative chemisorption of silane on Si(100)

Dang, Thanh Tung · 2007
DataCite · Datasets · 2007
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In this work, I present the results of my studies on the state-resolved reactivity of silane (SiH4) on the Si(100)-(2x1) surface. The results demonstrate a co-existence of both a direct and a precursor mediated mechanisms for the dissociative chemisorptions of SiH4 on Si(100)-(2x1). Above an inciden
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