HAL (France)
open access
Impact of Ge alloying on the early growth stages, microstructure and stress evolution of sputter-deposited Cu-Ge thin films
The effect of Ge alloying on the growth morphology and intrinsic stress evolution during deposition of Cu thin films is investigated using in situ and real time diagnostics, complemented by ex situ microstructural characterizations. Cu1-xGex alloys with x up to 0.15 were sputter-deposited at room te
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