HAL (France)
open access
Growth of c -axis AlN sputtered films on silicon-based substrates using 2D-TMD as nucleation layer
In RF filters based on bulk acoustic wave (BAW) resonators, AlN is a well-known piezo-active layer stacked between two molybdenum electrodes. The crystalline quality, e.g., the film texture along the c -axis of the AlN hexagonal lattice, has a direct effect on RF performances. However, the current c
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