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Comprehensive Acoustic Characterization of a Broadband Lateral MEMS Ultrasonic Transducer by Near-Field Acoustic Holography and Coupled Multiphysics Simulation
Broadband airborne ultrasonic transducers are attractive for applications such as ranging, echo-location, and acoustic material characterization, where wide bandwidths enable advanced excitation and signal-processing techniques. Recently, a lateral capacitive micromachined ultrasonic transducer (L-C
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