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In-IC Strategies for 3D Devices in Bulk Silicon

Bopp, Matthieu · 2011
DataCite · Datasets · 2011
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3dfinmembranesnanowires
The increase of components density in advanced microelectronics is practically dictated by the device size and the achievable pitch between the devices. Scaling down dimensions of devices and progress in the circuit design allowed following Moore's law during more than 40 years. Today the traditiona
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