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Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst

Théo Guilberteau et al.
HAL (France) · Papers · License: Open Access
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Chemical etching, 0, GHz-burst mode, 1, Fused silica, Laser processing, Bessel beam, Dielectrics
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Record · ID 144852
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