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Back-End-Of-Line Integration of 2-Terminal Ferroelectric Hafnia Synaptic Weights on Commercial CMOS Process
Functionalising the back-end-of-line (BEOL) of CMOS with emerging materials is a key route to neural network accelerators and neuromorphic systems. In this work, we demonstrate for the first time the integration of 2-terminal ferroelectric synaptic weights in the BEOL of as-delivered commercial 180
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