Conceptio › Archive › arXiv (All)
arXiv (All) open access

Effect of Rapid Thermal Annealing on the Superconductivity of ALD-Grown TiN thin films

Sadirkhanov, Z. et al.
arXiv (All) · Papers
Open Source ↗Direct PDF ↓
superconductivity
Titanium nitride (TiN) is a promising superconducting material for scalable quantum technologies owing to its tunable kinetic inductance and compatibility with CMOS thin-film processing. However, the superconducting performance of atomic-layer-deposited TiN can be degraded by oxygen incorporation, o
Conceptio Open Archive

Analyze & explore related research in Conceptio

Connect this record directly into your research workflow or AI agent. Explore citations across open repositories, query full text, and export structured proof bundles.

This document is indexed with metadata only: full text is not available in the archive for this record. Open the official source ↗

Related documents

Record · ID 1536254
Retrieved via Conceptio: every document is proof-bundled with source, license, and retrieval metadata.
Bring this data into your agent: Connect via MCP or API · 20 free credits to start · no card required
Read the Docs → · View CLI source on GitHub · Conceptio Open Knowledge Archive