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In-Situ Topography Characterization of Mirrors in a Six-Degree-of-Freedom Nanopositioning System
ddc:620, institut für prozessmess- und sensortechnik (1992-), .xlsx (microsoft office - ooxml - spreadsheet), .m (matlab), .mat (matlab), .csv (comma-seperated values), .svg (scalable vector graphics (svg)), .pdf (adobe portable document format)
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