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Gravure du verre de chalcogénure GeSbSe en plasma fluoré ou à base de méthane

Thibaut Meyer
HAL (France) · Papers · License: Open Access
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GeSe2, 0, Spectroscopie de photoélectrons X XPS, 1, Sb2Se3, X-ray photoelectron spectroscopy XPS
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Record · ID 246851
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