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Modified Reactive Sputter Deposition of Titanium Nitride Thin Films via HIPIMS with Kick-Pulse and Improvement of the Structure-Zone Model

Miceli, Andrew
Unf Digital Commons · Other
Open Source ↗
engineering
thesis, university of north florida, unf, dissertations, academic -- unf -- master of science in materials science & engineering, dissertations, academic -- unf -- engineering, thin film, hipims, sputtering
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