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Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection

Park, Kwan Kyu et al.
Kaist Koasas · Other
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technology
capacitive micromachined ultrasonic transducer, cmut, mems resonator, chemical sensor, cantilever array, microsensors, fabrication, technology
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Record · ID 326584
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