Conceptio › Archive › Kaist Koasas
Kaist Koasasmetadata only

Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding

Park, Kwan Kyu et al.
Kaist Koasas · Other
Open Source ↗
technology
capacitive micromachined ultrasonic transducer (cmut), direct wafer bonding, electrical breakdown, local oxidation of silicon (locos), parasitic capacitance, patterning of silicon via oxidation, silicon, technology
This document is indexed with metadata only — full text is not available in the archive for this record. Open the official source ↗
Record · ID 326586
Conceptio Open Knowledge Archive — every document is proof-bundled with source, license, and retrieval metadata.