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Pulsed-Liquid-Injection MOCVD of Epitaxial β-Ga<sub>2</sub>O<sub>3</sub> Thin Films as a Promising Alternative Chemical Route

Marielena Velasco Enriquez et al.
HAL (France) · Papers · License: Open Access
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thinfilms
Epitaxy, Metal-organic chemical vapor deposition, Green chemistry, Gasub2/subOsub3/sub, Thin films, 0, 1, Pulsed-liquid injection system
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Record · ID 354087
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