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Uniform amorphization of crystalline silicon surfaces enabled by deep ultraviolet femtosecond laser pulses

Wissal Benali et al.
HAL (France) · Papers · License: Open Access
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Silicon deep ultraviolet amorphization femtosecond surface writing laser processing, Silicon, Femtosecond, Laser processing, Surface writing, 0, Deep ultraviolet, Amorphization
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Record · ID 384678
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