Improvements and experimental validation of a 3D-probing system for micro-components

Name: Improvements and experimental validation of a 3D-probing system for micro-components
License: Open Access

Liebrich, Thomas et al.

DataCite · Datasets · License: Open Access

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development sensor

kapazitive messwandler (elektrische messtechnik), koordinatenmesstechnik (mechanik), sensor, metrology, coordinate measuring techniques (mechanics), development, capacitive transducers (electrical measurements)

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Record · ID 401872
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