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Subtractive fabrication of ferroelectric thin films with precisely controlled thickness

Ievlev, Anton V et al.

eScholarship · Papers

40 engineering (for-2020), 4016 materials engineering (for-2020), 34 chemical sciences (for-2020), 51 physical sciences (for-2020), ferroelectrics, thin films, ion beam fabrication, time-of-flight secondary ion mass spectrometry

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Subtractive fabrication of ferroelectric thin films with precisely controlled thickness

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