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Photolithography-free laser-patterned HF acid-resistant chromium-polyimide mask for rapid fabrication of microfluidic systems in glass
40 engineering (for-2020), 4016 materials engineering (for-2020), glass wet etching, hf acid resistant mask, glass microfabrication, microfluidics in glass, 09 engineering (for), 10 technology (for)
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