Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry

[2512.19940] Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry Skip to main content Search Submit Donate Log in Physics > Optics arXiv:2512.19940 (physics) [Submitted on 23 Dec 2025] Title: Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry Authors: Brendan McBennett , Michael Tanksalvala , Emma E. Nelson , Theodore H. Culman , Yunhao Li , Jiayi Liu , Ethan Berk , Albert Beardo , James Harford , Justin Shaw , Henry C. Kapteyn , Margaret M. Murnane , Joshua L. Knobloch View PDF HTML (experimental) Abstract: Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time scales. However, full field coherent diffraction imaging requires scanning of the sample combined with computational phase retrieval, making it challenging to quickly acquire a large series of dynamic frames. In this work, we demonstrate a technique for extracting dynamic 1D images of the average unit cell in a periodic sample from traditional EUV scatterometry data by analyzing the changing intensities of the far field diffracted orders. Starting from a system of equations relating small changes in far field diffraction to phase and amplitude perturbations at the sample plane, it is shown that under certain conditions, changes to the $n$th diffracted order map exclusively onto the $n$th Fourier component of the perturbation via a closed-form relation. We show through rigorous coupled-wave analysis simulations that our method can provide a good approximation even outside the scalar diffraction theory framework in which it is derived. Finally, we experimentally demonstrate this reconstruction method by exiting 1D nickel nanowires on a diamond substrate using an infrared laser pump pulse, and measuring their relaxation using a time-delayed EUV probe pulse, to visualize nanoscale phonon dynamics. Subjects: Optics (physics.optics) ; Applied Physics (physics.app-ph) Cite as: arXiv:2512.19940 [physics.optics] (or arXiv:2512.19940v1 [physics.optics] for this version) https://doi.org/10.48550/arXiv.2512.19940 Focus to learn more arXiv-issued DOI via DataCite Journal reference: Phys. Rev. Applied 26, 024024, 2026 Related DOI : https://doi.org/10.1103/py1n-pg79 Focus to learn more DOI(s) linking to related resources Submission history From: Brendan McBennett [ view email ] [v1] Tue, 23 Dec 2025 00:17:09 UTC (2,690 KB) Full-text links: Access Paper: View PDF HTML (experimental) TeX Source view license Current browse context: physics.optics < prev | next > new | recent | 2025-12 Change to browse by: physics physics.app-ph References & Citations SciX Google Scholar Semantic Scholar export BibTeX citation Bookmark Bibliographic Tools Bibliographic and Citation Tools Bibliographic Explorer Toggle Bibliographic Explorer ( What is the Explorer? ) Connected Papers Toggle Connected Papers ( What is Connected Papers? ) Litmaps Toggle Litmaps ( What is Litmaps? ) scite.ai Toggle scite Smart Citations ( What are Smart Citations? ) Code, Data, Media Code, Data and Media Associated with this Article alphaXiv Toggle alphaXiv ( What is alphaXiv? ) Links to Code Toggle CatalyzeX Code Finder for Papers ( What is CatalyzeX? ) DagsHub Toggle DagsHub ( What is DagsHub? ) GotitPub Toggle Gotit.pub ( What is GotitPub? ) Huggingface Toggle Hugging Face ( What is Huggingface? ) ScienceCast Toggle ScienceCast ( What is ScienceCast? ) Demos Demos Replicate Toggle Replicate ( What is Replicate? ) Spaces Toggle Hugging Face Spaces ( What is Spaces? ) Spaces Toggle TXYZ.AI ( What is TXYZ.AI? ) Related Papers Recommenders and Search Tools Link to Influence Flower Influence Flower ( What are Influence Flowers? ) Core recommender toggle CORE Recommender ( What is CORE? ) Author Venue Institution Topic About arXivLabs arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs . Which authors of this paper are endorsers? | Disable MathJax ( What is MathJax? ) We gratefully acknowledge support from our major funders , member institutions , and all contributors. About · Help · Contact · Subscribe · Copyright · Privacy · Accessibility · Operational Status (opens in new tab) Major funding support from (opens in new tab) (opens in new tab) (opens in new tab)

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