eScholarshipmetadata only
Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics
surface metrology, calibration, instrument transfer function, binary pseudo-random, test standard, power spectral density, aspheric optics, x-ray optics
This document is indexed with metadata only — full text is not available in the archive for this record.
Open the official source ↗
Record · ID 683942
Retrieved via
Conceptio — every document is proof-bundled with source, license, and retrieval metadata.