Fast On-Chip Thermometry with TiN Kinetic Inductance Resonators in 22 nm Process Technology

[2608.27057] Fast On-Chip Thermometry with TiN Kinetic Inductance Resonators in 22 nm Process Technology Skip to main content Search Submit Donate Log in Quantum Physics arXiv:2608.27057 (quant-ph) [Submitted on 27 Aug 2026 ( v1 ), last revised 28 Aug 2026 (this version, v2)] Title: Fast On-Chip Thermometry with TiN Kinetic Inductance Resonators in 22 nm Process Technology Authors: Johann Drayne , George Ridgard , Lorenzo Peri , Frederic Schlattner , Fabio Olivieri , Mathieu de Kruijf , Isaac Harris , Grayson Noah , James Kirkman , Alberto Gomez-Saiz , M. Fernando Gonzalez-Zalba , Thomas Swift View PDF HTML (experimental) Abstract: Understanding the temporal and spatial dependence of temperature is critical in high-performance cryogenic devices. Typical thermometry techniques struggle to simultaneously combine high bandwidth, sensitivity and on-chip integration, limiting their ability to measure fast intra-device thermal fluctuations. Here, we demonstrate a time-resolved thermometry platform based on TiN kinetic inductance resonators integrated in a 22 nm FDSOI chip. By tracking temperature-dependent shifts in the resonant frequency, we achieve sub-millikelvin temperature sensitivity down to temperatures of 100 mK. Time-resolved on-chip pulsed heating experiments as a function of distance reveal an onset delay, consistent with a quasi-ballistic heat propagation velocity of 3.9 ${\pm}$ 0.1 mm ${\mu}$s${}^{-1}$. We also show that elevated temperatures increase net thermal conductance, shortening thermal relaxation times across all spatial separations. This behaviour manifests in two distinct regimes: a substrate-limited regime at 100 mK, where cooling rates vary with heater distance, and a Kapitza boundary-limited regime at 400 mK, where thermal relaxation becomes more spatially uniform. These measurements demonstrate kinetic inductance thermometry's ability to rapidly probe non-equilibrium temperature dynamics in cryogenic devices such as quantum processors. Subjects: Quantum Physics (quant-ph) ; Mesoscale and Nanoscale Physics (cond-mat.mes-hall) Cite as: arXiv:2608.27057 [quant-ph] (or arXiv:2608.27057v2 [quant-ph] for this version) https://doi.org/10.48550/arXiv.2608.27057 Focus to learn more arXiv-issued DOI via DataCite Submission history From: Johann Drayne [ view email ] [v1] Thu, 27 Aug 2026 12:42:43 UTC (2,896 KB) [v2] Fri, 28 Aug 2026 09:47:29 UTC (2,896 KB) Full-text links: Access Paper: View PDF HTML (experimental) TeX Source view license Current browse context: quant-ph < prev | next > new | recent | 2026-08 Change to browse by: cond-mat cond-mat.mes-hall References & Citations INSPIRE HEP SciX Google Scholar Semantic Scholar export BibTeX citation Bookmark Bibliographic Tools Bibliographic and Citation Tools Bibliographic Explorer Toggle Bibliographic Explorer ( What is the Explorer? ) Connected Papers Toggle Connected Papers ( What is Connected Papers? ) Litmaps Toggle Litmaps ( What is Litmaps? ) scite.ai Toggle scite Smart Citations ( What are Smart Citations? ) Code, Data, Media Code, Data and Media Associated with this Article alphaXiv Toggle alphaXiv ( What is alphaXiv? ) Links to Code Toggle CatalyzeX Code Finder for Papers ( What is CatalyzeX? ) DagsHub Toggle DagsHub ( What is DagsHub? ) GotitPub Toggle Gotit.pub ( What is GotitPub? ) Huggingface Toggle Hugging Face ( What is Huggingface? ) ScienceCast Toggle ScienceCast ( What is ScienceCast? ) Demos Demos Replicate Toggle Replicate ( What is Replicate? ) Spaces Toggle Hugging Face Spaces ( What is Spaces? ) Spaces Toggle TXYZ.AI ( What is TXYZ.AI? ) Related Papers Recommenders and Search Tools Link to Influence Flower Influence Flower ( What are Influence Flowers? ) Core recommender toggle CORE Recommender ( What is CORE? ) Author Venue Institution Topic About arXivLabs arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs . Which authors of this paper are endorsers? | Disable MathJax ( What is MathJax? ) We gratefully acknowledge support from our major funders , member institutions , and all contributors. About · Help · Contact · Subscribe · Copyright · Privacy · Accessibility · Operational Status (opens in new tab)

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