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The importance of inner-shell electronic structure for enhancing the EUV absorption of photoresist materials
51 physical sciences (for-2020), 3403 macromolecular and materials chemistry (for-2020), 34 chemical sciences (for-2020), 3406 physical chemistry (for-2020), 02 physical sciences (for), 03 chemical sciences (for), 09 engineering (for), chemical physics (science-metrix)
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