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SPARSE -- Efficient High-Resolution SEM Imaging of Rare Microstructural Features Across Large Areas by Selective Rescanning

Reclik, Tom et al.
arXiv (All) · Papers
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applied-physicsinstrumentation-and-detectorsmaterials-science
Characterisation of rare microstructural features in scanning electron microscopy (SEM) requires imaging large areas at high resolution. This leads to prohibitively long acquisition times. We present an open-source Python framework that addresses this bottleneck through a two-stage approach: a fast
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