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Determination of the elastic behavior of silicon nanowires within a scanning electron microscope
fabricationfinite-element-methodnanowiresscanning-electron-microscopyscience-and-technologysilicontransmission-electron-microscopy
Three-point bending tests were performed on double-anchored, silicon nanowire samples in the vacuum chamber of a scanning electron microscope ( SEM) via a micromanipulator equipped with a piezoresistive force sensor. Nanowires with widths of 35nm and 74 nm and a height of 168nm were fabricat
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