Koc University Digital Collectionsmetadata only
Dynamic characterization and damping control of a MEMS structure - art. no. 671509
mechanical engineering; optics, mems design; quality factor; effective damping; dynamic characterization
This document is indexed with metadata only — full text is not available in the archive for this record.
Open the official source ↗Related documents
Record · ID 934843
Retrieved via
Conceptio — every document is proof-bundled with source, license, and retrieval metadata.